| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1d29f7ac2c7f9be9f7dae1a83bbb5c92 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-183 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-18 |
| filingDate |
2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de0a12efa317cff7dbc64498348fb650
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_403bc0ada083d418d9c61205b5853513 |
| publicationDate |
2016-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160010559-A |
| titleOfInvention |
Silica for cmp, aqueous dispersion, and process for producing silica for cmp |
| abstract |
It is possible to reduce scratches during polishing while securing a moderately high polishing rate. Aqueous dispersion using CMP silica, CMP silica, and method for producing silica for CMP satisfying the following (A) to (C). (A) BET specific surface area (specific surface area) of not less than 40 m 2 / g and not more than 180 m 2 / g (B) a particle density of 2.24 g / cm 3 or more as measured by a helium gas pycnometer method (C) a coefficient of variation of the primary particle diameter calculated by TEM / image analysis is not more than 0.40 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210109854-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190077397-A |
| priorityDate |
2013-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |