http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160005213-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6eaf9ab1b7b9f935fb9a1c40653d4f0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-853 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-25 |
| filingDate | 2014-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e50171a47fef7273ace6c9fe8ce06f8b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aabdd2f9c3a69ecbe68d8f3497eb061a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b03944f6ba486127ad08370b858ab435 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c4ea47aee40e3d12be2faed7e9242e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8c2a47823158013301bae682ca1a2cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27ba0c6538d992ef797f7946459b0268 |
| publicationDate | 2016-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20160005213-A |
| titleOfInvention | Electrostatic force based actuator including inorganic dielectric layer |
| abstract | The present invention relates to an electrostatic force based actuator including an inorganic dielectric layer, and more particularly to a pair of opposing substrates; A pair of electrodes disposed on the substrates and facing each other; An inorganic insulating film including a material selected from the group consisting of silicon oxide, aluminum oxide, zinc oxide, titanium oxide, and barium-titanium oxide; And an adhesion member disposed between any one of the electrodes and the inorganic insulating film, wherein attraction force acts between the electrodes due to polarization in the inorganic insulating film as voltage is applied to the electrodes, And the portions of the electrodes not overlapping the adhesive member are bent by the attractive force. According to the electrostatic force based actuator including the inorganic dielectric layer proposed in the present invention, the electrostatic force based actuator includes a material of any one of silicon oxide, aluminum oxide, zinc oxide, titanium oxide and barium-titanium oxide Wherein a voltage is applied to the electrodes, and as the voltage increases, the polarization of the inorganic insulating film increases, so that the attractive force between the electrodes increases and the mechanical deformation characteristic of the electrostatic force based actuator Can be improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210077307-A |
| priorityDate | 2014-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.