| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_61b749d696381cdd395cb2b220581d42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2014-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38fd47695efbae03e8eab2573ad112a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6aee5fa5eeceb025e22c8218ebe3940
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68629bb2b69b72f80b9e4dd67fb12c82 |
| publicationDate |
2015-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150145559-A |
| titleOfInvention |
Precursor compositions and Method for forming a thin film using thereof |
| abstract |
The precursor composition for film formation according to an embodiment of the present invention includes an organometallic compound represented by the following formula (1). ≪ Formula 1 > In the above formula (1), M is selected from the metal elements belonging to group 4A or group 4B on the periodic table. |
| priorityDate |
2014-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |