http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150128079-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a9c8be5926503f1c3cb4dbcce92afd13 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2014-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_299f299c2dcf2f50f237a21b6d75eab9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e8f83a5d01c9e877a20fefd94e8f880 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d5b10d5beeaa69ef5879ea72984b262 |
| publicationDate | 2015-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150128079-A |
| titleOfInvention | Method for manufacturing resistive thin film for Bolometer and Bolometer |
| abstract | A second step of preparing an oxidizing solution containing an oxidizing agent for oxidizing the metal and a pH adjusting agent for adjusting pH, a first step of dissolving a chloride containing a metallic element in deionized water to prepare a reaction solution, And a fourth step of depositing an oxide thin film on the substrate through the third step spraying; and after the fourth step, the oxide thin film is oxidized in an oxidizing atmosphere or in an oxidizing atmosphere Further comprising the step of performing a subsequent heat treatment in an inert atmosphere so that the resistive thin film has a low resistivity, a high TCR value, and a low 1 / f noise characteristic, and a resistive thin film for a bolometer, The stability of the phase of the resistive thin film is stable in the operating temperature range, so that excellent precision and improved temperature stability To a bolometer. |
| priorityDate | 2014-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.