Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1229111a198f86af4112ecd730b55cd9 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0837 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-141 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-0073 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
filingDate |
2014-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a646158eada3a33d238219719aa8dd0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8f258587d122abd6e889e18d85dd520 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42c624d77f45773dabe43802296c9595 |
publicationDate |
2015-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20150126404-A |
titleOfInvention |
Device for protecting an electrode seal in a reactor for the deposition of polycrystalline silicon |
abstract |
The present invention relates to an apparatus for protecting an electrode seal in a reactor for polycrystalline silicon deposition wherein a sealing member 2 is arranged in the space between the electrode holder 1 of the electrode and the base plate 3 of the reactor, A protective ring 4 is provided which radially surrounds the holder 1 and the sealing member 2 and touches the base plate or is provided with the electrode holder 1 and the sealing member 2 in a radial manner, There is provided an additional protection member which radially surrounds the electrode holder 1 and the sealing member 2 or which touches the electrode holder in addition to the protection ring 4 The protective ring 4 of the piece or the plural pieces touches the electrode holder 1 at the sides and has a specific electrical resistivity of more than 10 9 ? Cm at room temperature and at the same time a specific heat of more than 10 W / mK at room temperature Electrical section with conductivity It provides that would be made of a material unit. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210012942-A |
priorityDate |
2013-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |