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publicationDate 2015-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150122736-A
titleOfInvention Rare-earth oxide based erosion resistant coatings for semiconductor application
abstract The article includes a body coated with a ceramic coating. The ceramic coating may comprise from about 45 mol% to about 99 mol% Y 2 O 3 , from about 0 mol% to about 55 mol% ZrO 2 , and from about 0 mol% to about 10 mol% Al 2 O 3 . The ceramic coating may alternatively comprise from about 30 mol% to about 60 mol% Y 2 O 3 , from about 0 mol% to about 20 mol% ZrO 2 , and from about 30 mol% to about 60 mol% 2 O &lt; 3 &gt;.
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