| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0acd20e3c3819b795fa3d905e7bfd096 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2012-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54daa578aeb085bc47ac83629a830c05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78d01e7c62f597367ea9f7304b57179a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0a9cb72328b3102cc2114ba1b21b917 |
| publicationDate |
2015-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150122258-A |
| titleOfInvention |
Polishing pad with concentric or approximately concentric polygon groove pattern |
| abstract |
A polishing pad having a concentric or substantially concentric polygonal groove pattern is disclosed. A method of manufacturing a polishing pad having a concentric or approximately concentric polygonal groove pattern is also described. |
| priorityDate |
2011-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |