http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150117179-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_61b749d696381cdd395cb2b220581d42 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27806a63b6063e6d9838774ca6229759 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6aee5fa5eeceb025e22c8218ebe3940 |
| publicationDate | 2015-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150117179-A |
| titleOfInvention | Novel precursor compounds for forming zirconium-containing film, compositions for forming zirconium-containing film comprising the same, and method of forming zirconium-containing film using them as precursors |
| abstract | A cyclopentadienyl zirconium (IV) -based compound having a cycloalkyl group substituted with a cycloalkyl group represented by the following formula (1), a zirconium-containing film-forming precursor composition containing the same, and a method for forming a zirconium- ≪ Formula 1 > In the composition, the compound of Formula 1 is stable and uniformly mixed with each other in a liquid state without reacting with the components of the compound of Formula 1. Therefore, the composition behaves like a single compound and exhibits a high vapor pressure. When the composition of the present invention is used, a zirconium-containing film of high quality such as zirconia can be obtained economically and economically. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107188908-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017188546-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113563198-A |
| priorityDate | 2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 93.