http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150112884-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-06 |
| filingDate | 2015-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32a5230e224ad6a9587a081c5ba30f00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d272445fd581dd50770c568cbdbb084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae6159562b1edbcf416034f0b7a01fb2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa485c7f56d146cd9f855a87b1388ab7 |
| publicationDate | 2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150112884-A |
| titleOfInvention | Production process of resist polymer and polymer used in the production process |
| abstract | The present invention is to provide a method for producing a resist polymer, which is capable of easily producing a polymer with excellent inhibitory properties against bridge defects of a resist composition at higher reproducibility. The method for producing a resist polymer comprises a process of bringing a first polymer which has a structure unit including a first structure, and a second polymer which has a structure unit including a second structure and a different structure unit and is different from the first polymer, respectively into contact with a first solvent and a second solvent which does not dissolve with the first solvent. In addition, the first structure is the same type as the second structure. With respect to the touching process, it is desirable that a first composition containing the first polymer and the first solvent comes into contact with a second composition containing the second polymer and the second solvent. In addition, it is desirable that the first and second structures have a structure having a polarity. |
| priorityDate | 2014-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 118.