| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-03602 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2015-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c1ec40f4081ddafb9577a4cc48f7914
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f318c4e4f60e52e7504bab0d8e25fd8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1dcbebcf1931a502b4e4cb9b571b5577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3803bd8db499ecc41defc825ae4b2b51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3822d243414ec78e7b6bda3a92eb3971
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_677116730e486adab541abf44c9a3f90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc5cb7b5b7bbcd54867c862f7dd280f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa5efd9651c8018ffec621f9cc4a6c05 |
| publicationDate |
2015-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150112853-A |
| titleOfInvention |
Soft and conditionable chemical mechanical polishing pad with window |
| abstract |
Abrasive layer; And a chemical mechanical polishing pad having a window incorporated into the polishing layer; Wherein the polishing layer comprises a reaction product of a component comprising an abrasive layer prepolymer and a polishing layer curing system comprising an abrasive layer amine initiated polyol curing agent, a polishing layer high molecular weight polyol curing agent, and a polishing layer bifunctional curing agent; The window comprises a reaction product of a component comprising a window prepolymer and a window hardener system comprising a window diisocyanate curing agent, a window amine initiated polyol curing agent, and a window high molecular weight polyol curing agent; The abrasive layer has a density of ≥ 0.6 g / cm 3 ; A Shore D hardness of 5 to 40; Elongation elongation of 100 to 450%; And a cutting speed of 25 to 150 μm / hr. |
| priorityDate |
2014-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |