| abstract |
The present invention provides a chamber comprising: a chamber; Gas inlet; Gas outlet; A dip tube contained within the chamber and having an upper portion and a lower portion wherein the upper portion of the deposition tube is in fluid communication with the gas inlet and is operative to permit entry of a carrier gas, the lower portion of the deposition tube being connected to the chamber, ); And a sleeve, wherein the sleeve has first and second ends, the first end being interference fit with the bottom of the deposition tube; The sleeve vibrates during disturbance. |