| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2014-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a51c6696866cb9ec86ff32821f2d82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c720e9faa8b9122dc785f2656ef9873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d3ec91ae4d4d9c2b88c523e7f8cceaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9711a30c5d169092e5087cb7597e1685 |
| publicationDate |
2015-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150095040-A |
| titleOfInvention |
Method of manufacturing semiconductor device |
| abstract |
A method of manufacturing a semiconductor device is provided. Forming a neutral film having photosensitivity and reflow characteristics on the antireflection film, exposing and developing the neutral film to form a preliminary neutral pattern for partially exposing the antireflection film, heating the preliminary neutral pattern to form a neutral pattern, Forming a block copolymer film on the pattern and then heating the block copolymer film to form a block copolymer pattern including a first pattern on the exposed anti-reflection film and a second pattern covalently bonded to the first pattern on the neutral pattern . |
| priorityDate |
2014-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |