| abstract |
The gas purifying filter unit (10) includes a first removing unit (11) for removing impurities of a gas component in impurities contained in ozone generated by the ozone generating unit, and a second removing unit And a second removing unit (12) for further removing impurities of the solid fine particles from the impurities from which the components have been removed. Ozone containing impurities is introduced from the inlet end 10a of the gas purifying filter unit 10 and permeated through the first removing unit 11 and the second removing unit 12 to remove impurities from the outlet 10b, The removed ozone is discharged. |