| abstract |
(1), (2), (3) and the like useful for producing a ruthenium-containing thin film even under the condition of using a reducing gas as a reaction gas under the condition of using an oxidizing gas as a reaction gas, A method for preparing a ruthenium complex is provided: In the formula, R 1a to R 7a , R 8 to R 9 , and R 10 to R 18 represent an alkyl group having 1 to 6 carbon atoms. n represents an integer of 0 to 2; |