| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-95676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8848
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-21 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-4738 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95 |
| filingDate |
2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68a1956593cbc5265f4b5e4dd432e19b |
| publicationDate |
2015-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150086340-A |
| titleOfInvention |
Apparatus and methods for detecting defects in vertical memory |
| abstract |
Methods and apparatus for investigating a vertical memory stack are disclosed. On the illumination tool, incident light having a first wavelength range is used to detect defects on the surface of the vertical memory stack. On the illumination tool, incident light having a second wavelength range is used to detect defects both on the surface and on the depth of the vertical memory stack. Defects that are detected using the first and second wavelength ranges are used to exclude defects on the surface and to detect defects only in the depth first of the vertical memory stack. |
| priorityDate |
2012-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |