abstract |
Sense of an actinic ray or last radiation-sensitive resin composition, triphenyl set of phosphonium na case where, based on the plate, the relative absorbance in ε r, and when the relative quantum efficiency φ r, the relative absorbance ε r is 0.4 to 0.8 and which generates an acid by irradiation with an actinic ray or radiation having? R x? R of 0.5 to 1.0. |