| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033 |
| filingDate |
2014-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11313092373bac8a89ce87643a1a87b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_016000599dba42b56ac1070e528fb54f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fb088a45c2b4b08718467365d92e212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be2968d37c9bdfd61f533ee37b0c799b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e460b69e2f5c74857efc6d0f0153fd1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdfa7c7f7838b5dca12449be80fb1e42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16f20f1a6d0b33e9fc0c1c28a5cf8b5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7233752c7c938a76cf526ff6aab26708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c5b34cd94045db49c689dd048cc3f91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65f1c94d19cef7556e5375f8e32377bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bafe6f0245911707bb92e912bbea4b6 |
| publicationDate |
2015-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150075374-A |
| titleOfInvention |
Methods of forming patterns |
| abstract |
Some embodiments include a method of forming a pattern. A first mask is formed over the material. The first mask defines a first pattern having features extending therein. The first pattern has a first level of uniformity over the distribution of features. A brush layer is formed in the feature across the first mask to narrow the feature to create a second mask from the first mask. The second mask has a second level of uniformity that is greater than the first level of uniformity over the narrowed feature. The pattern is transferred to the material through a second mask. |
| priorityDate |
2013-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |