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publicationDate 2015-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150073239-A
titleOfInvention A monolithic radiation sensor to detect multiple radiation and method of producing the same
abstract Disclosed is a heterogeneous radiation measuring sensor and a manufacturing method thereof. A semiconductor substrate, at least one lower electrode formed on a lower surface of the semiconductor substrate, a plurality of upper electrodes electrically connected to the lower electrode on the upper surface of the semiconductor substrate, and a sensing film reacting with different materials on the plurality of upper electrodes.
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Total number of triples: 26.