| abstract |
The multilayer polyimide film comprises a first polyimide layer containing a fluorine-containing polymer particle and having a first surface and a second surface, and a second polyimide layer disposed on the first surface and the second surface, respectively, 3 polyimide layer. The second and third polyimide layers contain organic silicon oxygen compound particles. The multilayer polyimide film has a coefficient of thermal expansion (CTE) between 13 and 30 ppm / ° C. |