| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_448346e8497f01816db14071c5319040
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa6e4421d9e1159b6012d9bf702be572 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-34 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-387
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-2086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-426 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18 |
| filingDate |
2013-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d1a2ae794fb50e5373459ac094c142e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e341eb33800b878a602f68877b3a7b5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a18d543f77f270639a0ca30ecbcad47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b09e04945e4b944e4de5d0c3e780331d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd4ffae11cfef96b1256ee76b8a6bd50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d95079376e61bf9263f96e81044eef95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b60e0d6a3fe7a53a47b41715d7d9f954 |
| publicationDate |
2015-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150060888-A |
| titleOfInvention |
Substrate processing method for supporting a catalyst particle for plating process |
| abstract |
The present invention provides a method for processing a substrate for supporting metal fine particles for forming a plating layer on TSVs and various substrates, which enables fine processing and enables formation of a stable plating layer. The present invention is a method of treating a substrate in which a colloid solution containing the metal particles is brought into contact with a substrate to carry metal particles serving as catalysts for forming a plating layer on the substrate, wherein the colloid solution has a particle diameter of 0.6 nm And a Pd having an interplanar distance of not less than 2.254 angstroms on the (111) plane. With respect to the surface of the substrate before this treatment, the bonding force of the Pd particles can be increased by forming an organic layer such as SAM. |
| priorityDate |
2012-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |