| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R31-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04R19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04R31-00 |
| filingDate |
2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d60bd111dfd27763f833d6c9532f970a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ebe59611b79918a07ceea00b4fb44ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8026e207142a157e8c1ce4663cc99ba9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb9e8f8bd646a80b24d797cd51feb356 |
| publicationDate |
2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150057795-A |
| titleOfInvention |
Capacitive micromachined ultrasonic transducer and method of fabricating the same |
| abstract |
A capacitive microfabrication ultrasonic transducer and a method of manufacturing the same are disclosed. The disclosed ultrasonic transducer includes a device substrate including a first trench for dividing each element into a plurality of first portions and a second trench spaced apart from the first trench; An upper electrode electrically connected to the second portion in the second trench through a hole through the membrane and the support on the membrane; . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023023052-A1 |
| priorityDate |
2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |