http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150055617-A

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
filingDate 2013-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56671bd4995cd031f3314280c885e2d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11147c4bacf2b61803909e1762156a7e
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publicationDate 2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150055617-A
titleOfInvention Polishing composition
abstract A polishing composition capable of sufficiently maintaining a high polishing rate for a barrier layer and an insulating film, sufficiently suppressing a polishing rate of a low dielectric constant material, and preventing agglomeration of abrasive grains is provided. The present invention is a polishing composition used for polishing an object to be polished having a barrier layer, a metal wiring layer and an insulating film, and is a polishing composition comprising an oxidizing agent and a nonionic compound having a weight average molecular weight of 1000 or less.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170075308-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180125961-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210104162-A
priorityDate 2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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