| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2014-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_609289ed8cf2435974d1ed9b23bce907
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f01a32f561cb7aa08df312a215b07de8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3f9a4c09da30638ae395e0da2750d29 |
| publicationDate |
2015-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150053712-A |
| titleOfInvention |
Positive resist composition, method of forming resist pattern, method of forming pattern comprising metal layer, and method of producing through electrode |
| abstract |
(assignment) Provided is a positive resist composition which does not cause defective shape due to post-baking. (Solution) (A), a phenol compound component (B), and a photosensitive component (C) containing a novolak resin containing a p-cresol repeating unit (a1) and an m- Wherein the molar ratio of the repeating unit (a1) to the repeating unit (a2) in the novolac resin is from 6/4 to 5/1, And a novolac resin (A2) having a repeating unit (a1) / repeating unit (a2) = 1/9 to 4/6. |
| priorityDate |
2013-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |