http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150052328-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13069
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B44-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
filingDate 2010-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10941373b6a864097266d70055b7c335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3fcf601d3c982647edb04227554ebd4
publicationDate 2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150052328-A
titleOfInvention Method for manufacturing semiconductor device
abstract A thin film transistor having a thin film transistor having excellent electrical characteristics without causing an increase in the number of processes when a gate electrode is formed above and below the channel forming region of the thin film transistor through the gate insulating film in order to control the threshold voltage of the thin film transistor One of the tasks is to obtain a semiconductor device. The gate electrode provided above the oxide semiconductor layer is formed simultaneously with the patterning of the oxide semiconductor layer to reduce an increase in the number of processes required for manufacturing the second gate electrode.
priorityDate 2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451819949
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217673
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419506960
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520486
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359967
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555779
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578761
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5357696
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360835
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14782
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5139834
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327157
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577479
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3034010
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449789534
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23994
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453080860
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458437694
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239

Total number of triples: 47.