http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150048047-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_695f5d1529a84814bb77f017051187c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11e1e95573cdbb69e17880f0542427b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f92eca2784174f96a1194f1aedb66c8f |
| publicationDate | 2015-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150048047-A |
| titleOfInvention | Method of forming resist pattern, and resist composition |
| abstract | A resist pattern is formed by using a resist composition containing a polymer compound having a structural unit represented by the general formula (a0-1) and patterning the resist composition by a negative development using a developer containing an organic solvent. In the general formula (a0-1), R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms. Va 0 is a divalent hydrocarbon group which may have an ether bond, a urethane bond or an amide bond. n a0 is an integer of 0 to 2; R 1 is a chained or cyclic aliphatic hydrocarbon group. R 2 is a group forming a monocyclic group together with the carbon atom to which R 1 is bonded. R 3 is a cyclic group which may have a substituent. [Chemical Formula 1] |
| priorityDate | 2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 284.