| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 |
| filingDate |
2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ef812894bfc2ae4bfeb2ccff9f9854c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2aae65acbcab27a6445167c345f0fc51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60580bbc7de4bc340359210d5a6ebebb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9711a30c5d169092e5087cb7597e1685 |
| publicationDate |
2015-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150047856-A |
| titleOfInvention |
Cleaner and method for fabricating semiconductor device using it |
| abstract |
It is an object of the present invention to provide a cleaning liquid which removes an adhesive containing a polymer including siloxane with an adhesive which adheres a semiconductor substrate and a carrier. Wherein the cleaning liquid comprises a first oxidizing agent represented by the following formula: (Formula) In the above formula, A is one of a hydroxyl group, a halogen, an alkyl group and an aryl group. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10894935-B2 |
| priorityDate |
2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |