http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150046756-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-507 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45538 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45542 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2014-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150046756-A |
| titleOfInvention | Tandem source activation for cyclical deposition of films |
| abstract | The method includes flowing reactant gases into the process chamber. A plasma having a first power level is supplied using a plasma source. The precursor is dosed to the process chamber. The first power level is sufficient to enhance the adsorption of the precursor onto the surface of the substrate and is insufficient to decompose the adsorbed precursor. After a first predetermined period of time, the method includes removing a portion of the precursor that is not adsorbed to the substrate. The adsorbed precursor is activated using a plasma having a second power level using a plasma source. The second power level is greater than the first power level and is sufficient to disassemble the precursor. |
| priorityDate | 2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 119.