http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150046450-A

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filingDate 2013-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150046450-A
titleOfInvention Semiconductor buffer structure, semiconductor device employing the same and method of manufacturing semiconductor device using the semiconductor buffer structure
abstract The disclosed semiconductor buffer structure includes a silicon substrate; A nucleation layer formed on the silicon substrate; (0? X <1, 0? Y <1, 0? Z <1, 0? X + y + z? 1) formed on the nucleation layer and having a constant composition ratio, B x Al y In z Ga 1-xyz N A second layer formed of the same material as the nucleation layer and a third layer made of the same material and composition as the first layer on the first layer, And a buffer layer.
priorityDate 2013-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 25.