http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150039119-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H7-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2014-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150039119-A |
| titleOfInvention | Control of impedance of rf return path |
| abstract | A system for controlling the impedance of a radio frequency (RF) return path includes a matching box comprising a matching circuit. The system further includes a radio frequency (RF) generator coupled to the matching box to supply the RF supply signal to the matching box through a first portion of the RF supply path. The RF generator is coupled to the matching box to receive the RF return signal through a first portion of the RF return path. The system includes a switching circuit; And a plasma reactor coupled to the switching circuit through a second portion of the RF return path. The plasma reactor is coupled to the matching circuit through a second portion of the RF supply path. The system includes a controller coupled to the switching circuit and the controller is configured to control the switching circuit based on a tune recipe to change the impedance of the RF return path. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160124006-A |
| priorityDate | 2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.