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filingDate 2013-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2015-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150036410-A
titleOfInvention Chemical mechanical polishing composition comprising non-ionic surfactant and carbonate salt
abstract Chemical mechanical polishing (CMP) composition (Q) comprising the following components: (A) an inorganic particle, an organic particle, or a mixture or a composite thereof (the particles are cocoon-shaped) (B) a non-ionic surfactant, (C) a carbonate or bicarbonate, (D) an alcohol, and (M) aqueous medium.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190054105-A
priorityDate 2012-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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