http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150032530-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate | 2013-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7c06b538b57d4ecac4b9c24fd54b86d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3cc8c0232af7d6fba1fdf32fdc906a |
| publicationDate | 2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150032530-A |
| titleOfInvention | Composition and method for polishing molybdenum |
| abstract | The present invention relates to compositions and methods for polishing molybdenum metal-containing surfaces. The polishing composition (slurry) described herein comprises an inorganic particulate abrasive material (e.g., alumina or silica) with an abrasive concentration suspended in an acidic aqueous medium containing a water soluble surface active agent and an oxidizing agent. The surface-active substance may be an anionic substance, a nonionic substance, or a combination thereof when the surface active substance includes a cationic substance and the particulate abrasive has a negative zeta potential when the abrasive has a positive zeta potential Based on the zeta potential of the particulate abrasive. |
| priorityDate | 2012-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.