abstract |
(A) applying a positive photosensitive resin composition comprising an alkali-soluble resin, a crosslinking agent, a photoacid generator, and a solvent onto a substrate; (B) pre-heating (prebaking) the applied positive photosensitive resin composition at 150 ° C to 200 ° C after drying; (C) pre-heating and then exposing; (D) after the exposure and development; And (E) a step of curing after development, and a photosensitive resin film produced by the above method. |