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publicationDate 2015-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20150027150-A
titleOfInvention Fluid capture of nanoparticles
abstract Describe a nanoparticle manufacturing apparatus. The apparatus may comprise a reactor for producing nanoparticle aerosols containing nanoparticles in a gas. The apparatus also includes a diffusion pump with a chamber having an inlet and an outlet. The outlet of the chamber is in fluid communication with the outlet of the reactor. The diffusion pump also includes a reservoir in fluid communication with the chamber to carry the diffusion pump fluid and a heater to vaporize the diffusion pump fluid in the reservoir to form the vapor. The diffusion pump also includes an injection assembly in fluid communication with the reservoir, with a nozzle for discharging the vaporized diffusion pump fluid into the chamber. The apparatus may further comprise a vacuum pump in fluid communication with the outlet of the chamber. Methods for making nanoparticles are also provided.
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