http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150015388-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-185 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2014-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150015388-A |
| titleOfInvention | Method of producing structure containing phase-separated structure, method of forming pattern and method of forming fine pattern |
| abstract | A step of forming a layer comprising a neutralized film on a support, a step of forming a layer containing a block copolymer in which a P A block and a P B block composed of other structural units are bonded on a layer made of a neutralization film, a method for producing a structure that contains a phase separation structure and a step of annealing the layer containing the copolymer, P a block, P B block, and neutralization, the membrane surface of each of the free energy (dispersion component (d) 0.5, a polar component (p) 0.5) point a ((dP a) 0.5, (pP a) 0.5), point B ((dP B) of the P B block 0.5, (pP B) 0.5 a, P a block on the coordinate plane of the ) And a point N of the neutralization membrane ((dP N ) 0.5 , (pP N ) 0.5 ), the point N of the neutralization membrane is within a predetermined range. |
| priorityDate | 2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 157.