| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136286 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed3c220df8adcfc73dbcc17e05277ecf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9094351ab429c10ea501e9d7e0fae0cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d48a3d9b5a6eea63aad04901c534ee7 |
| publicationDate |
2015-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20150004971-A |
| titleOfInvention |
Manufacturing method of an array substrate for liquid crystal display |
| abstract |
The present invention relates to a method for manufacturing an array substrate used in a liquid crystal display device. The method includes the steps of: a) forming gate electrodes on a substrate; b) forming a gate insulation layer on the substrate including the gate electrodes; c) forming a semiconductor layer (n+a-Si:H and a-Si:H) on the gate insulation layer; d) forming source/drain electrodes on the semiconductor layer; and e) forming pixel electrodes connected to the drain electrodes. The a) and d) steps include the steps of etching a copper-based metal film to form the respective electrodes. The etching liquid composite used in the etching process includes a citric acid as a process number improver and a polyhydric alcohol type surfactant. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190106475-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200114895-A |
| priorityDate |
2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |