http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140145549-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13dee5a458937040a9d2393e204888d6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2874 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2863 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| filingDate | 2014-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6235d00ce455317c6884184bbfc734c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc8a7630da198205f1bb5af9beb6f743 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86ba8ad7e25539cdca6a594d6f606048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb49944a2b4c43cd7b290e2121f8c6b0 |
| publicationDate | 2014-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140145549-A |
| titleOfInvention | Probe Card and Method for Manufacturing the Same |
| abstract | A probe card corresponding to two measurement temperatures is provided. A probe card for connecting an electrode of a subject to be inspected and a tester for electrical testing of a subject to be inspected disposed on a work table on which a heat source is assembled. A probe card includes a probe substrate on which a conductive path connected to a tester is formed, a probe substrate on which a conductive path corresponding to the conductive path of the circuit substrate is formed and provided with a probe connected to the conductive path, And a thermal expansion adjusting member having a coefficient of linear expansion different from that of the probe substrate so as to constrain heat expansion and contraction of the probe substrate and constituting a complex with the probe substrate. If it is assumed that the complex is at the corresponding arrival temperature (T2, T'2) when the inspected object is at two measurement temperatures (T1, T'1), the temperature difference between the respective measured temperatures and the corresponding arrival temperature (T1 -T2, T'1-T'2) of the object to be inspected are substantially equal to each other. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102210841-B1 |
| priorityDate | 2013-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449422141 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9942228 |
Total number of triples: 24.