http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140140654-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_515c23e6c58230b33d8e0718e30e18ef |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1291 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1275 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G25-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2013-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7986b8b25903fb366ea780a50307ef64 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_848c6cbd278deca369915fa0483a2ee3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b642608ef01757446ef2aed2f1c329e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec3bddc93bc113826ae3c4ce3c3d5d90 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3411108a70d079c538f00bed401edb0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30c6d6918acd31d2b6d296770effe696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28eb2abe0c18e5931dae481ae5af09bd |
| publicationDate | 2014-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140140654-A |
| titleOfInvention | Composition for producing compound oxide thin film, method for producing thin film using composition, and compound oxide thin film |
| abstract | The present invention provides a composition capable of forming a composite oxide thin film applicable to an oxide semiconductive film or the like by spray pyrolysis or the like, and a method of forming a composite oxide thin film by using the composition. The present invention relates to a composition for preparing a composite oxide containing at least one element selected from the group consisting of a Group 4A element and a Group 4B element, at least one element selected from the group consisting of a zinc element and a Group 3B element . At least one compound selected from the group consisting of a compound including a zinc element and a compound including a group 3B element, a partial hydrolyzate of the compound with water or a compound containing the compound and the partial hydrolyzate, and a compound including a group 4A element and At least one compound selected from the group consisting of compounds including a Group 4B element, a partial hydrolyzate of the compound with water or the compound and the partial hydrolyzate. The present invention relates to a composite oxide thin film having an average transmittance of 80% or more with respect to visible light, including the step of coating the composition on the surface of a substrate in an inert gas atmosphere and then heating the obtained coating film at least once, And a method for producing the same. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022169290-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190113824-A |
| priorityDate | 2012-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 285.