| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate |
2013-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b017ab90ebb5e3f9c0d200a1fb4322f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6dedb2bfd6b34c51908678e6ad554b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d338fa9da212910df6f0916095817b8 |
| publicationDate |
2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140138881-A |
| titleOfInvention |
Underlayer film forming composition for self-assembled films |
| abstract |
[PROBLEMS] To provide a lower layer film forming composition used for a lower layer of a self-assembled film. A composition for forming a lower layer film of a self-assembled film containing a polysiloxane and a solvent. And the polysiloxane is a hydrolyzed condensate of a silane containing a phenyl group-containing silane. Polysiloxane the formula (1):. R 2 Si (R 1) in 3 formula (1) (wherein, R 1 represents an alkoxy group, an acyloxy group, or a halogen atom, R 2 is may be have a substituent, a benzene ring And is a group bonded to a silicon atom by a Si-C bond) in a total amount of 10 to 100 mol% of the silane in the total silane is a hydrolysis-condensation product of silane. The silane represented by the formula (1), the silane represented by the formula (1), the silane represented by the formula (2) and the silane represented by the formula (3) Is a hydrolyzed condensate of silane containing the indicated silane in mole% in a ratio of 10 to 100: 0 to 90: 0 to 50. R 4 Si (R 3 ) 3 Formula (2) Si (R 5 ) 4 Formula (3) |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396612-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10824076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190103278-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190103230-A |
| priorityDate |
2012-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |