| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d527f9a5c3e991a1797de3518a88d14 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06716
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-4913
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07307
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c353cfc33c4c5a87553bf2f69951dfd |
| publicationDate |
2014-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140134286-A |
| titleOfInvention |
Fine pitch probe array from bulk material |
| abstract |
A fine pitch probe array is formed from a bulk material. According to a first method embodiment, the article of manufacture comprises an array of probes. Each probe includes a probe tip adapted to contact an integrated circuit inspection point. Each probe tip is mounted on a probe finger structure. All probe finger structures in the array have the same material particle structure. The probe fingers are configured to have a nonlinear profile and / or to act like a spring. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190034687-A |
| priorityDate |
2012-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |