http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140131313-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2014-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474c932f8beca75a8562f0bb1ff6ab4f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_888a9d162b5998b194c47de625531d8a |
| publicationDate | 2014-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140131313-A |
| titleOfInvention | Method of manufacturing semiconductor device, substrate processing apparatus, and recoding medium |
| abstract | A problem to be solved is to suppress the decrease of the film formation rate and to suppress the increase of the dielectric constant when forming a thin film containing a predetermined element, oxygen, carbon and nitrogen in a low temperature region. A step of supplying a carbon-containing gas to a substrate, a step of supplying a gas containing a predetermined element to the substrate, a step of supplying a carbon-containing gas to the substrate, A thin film containing a predetermined element, oxygen, carbon, and nitrogen is formed on a substrate by performing a cycle of performing a process of supplying an oxidizing gas to the substrate and a process of supplying a nitride gas to the substrate in this order a predetermined number of times Process. |
| priorityDate | 2012-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 80.