| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d21cbff64022f95c237c0bd3ec8656ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D2252-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D137-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04611b31e95c2b267edcf61cfd3a59d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05d732e682c19a150b984ba6f19ff2ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fdbcb12b79dccbee7726e44bde939f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d636325659942b8d97bf29eaa8deefb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13df937234e701694cd52c19c3a26a91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ad36f51cc32cb1410da8f100dbe8d16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b511201f28ad4a6354e8a09b2a2f3000
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68380cd8ca93d89eaab15e7c88fd6b0c |
| publicationDate |
2014-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20140130146-A |
| titleOfInvention |
Anhydride copolymer top coats for orientation control of thin film block copolymers |
| abstract |
The present invention includes the use of random copolymer top cords that can be used to control the interfacial energy of the topcoat block copolymer interface by spin coating on the block copolymer thin film. Topcoats are soluble in aqueous weak bases and can change surface energy when they are deposited on thin films of block copolymers. The use of self-assembling block copolymers to produce improved lithographic patterns depends on their orientation control in the thin film. The topcoat potentially enables easy alignment of the block copolymer which otherwise becomes very difficult. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200079127-A |
| priorityDate |
2012-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |