http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140128241-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2014-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_505218b0894cc57fcc679b7e6d3bfd96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6599e693ff9661933a410b027a9e100 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_098a707d3e7994b181d3da1339cce7f9 |
| publicationDate | 2014-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140128241-A |
| titleOfInvention | Resist composition and method of forming resist pattern |
| abstract | A resist composition comprising a base component in which solubility in a developer is changed by the action of an acid and an acid generator component that generates an acid upon exposure. Wherein the base component contains a polymer compound having a structural unit represented by (a0-1), and the acid generator component contains a compound represented by (b1). [R is a halogenated alkyl group, Ya 1 of H, C 1 ~ 5 alkyl group, C 1 ~ 5 of a single bond, a divalent linking group, La 1, La 2 Is -SO 2 -, -C (= O ) -, Ra 1 is, such as cyclic group which may have a substituent, n 1, n 2 Is 0 or 1. R 11 is a cyclic group of 5 ~ C 30 which may have a substituent, V 11 represents a single bond, an alkylene group of C 1 ~ 6, L 11 is C, which may have an ester bond, Y 11 is F An alkylene group of 1 to 5 , m is an integer of 1 or more, and M m + is an organic cation of m. [Chemical Formula 1] |
| priorityDate | 2013-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 198.