patent/KR-20140113265-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140113265-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2101-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80986 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80894 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80895 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-80896
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K20-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-0016
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
filingDate	2013-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18b3df711fee8a2cc0a7d2b1225964e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb9e7f2684f31dcc939610c7ad349cca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a25fdce297194a61c5ce836f403a25ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_959ebdb809e7bd06ff84ccfe9a8d0f50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b2b399b6fbf0f8ae3ec89b8b486a672 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82f61c624d753557d2fa35b370058c02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fad4f27b456e4103e03d3be34adf530 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_028241a840a0175b8e0d60dd174a937b
publicationDate	2014-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	KR-20140113265-A
titleOfInvention	Integrate rinse module in hybrid bonding platform
abstract	The method includes performing a plasma activation on the surface of the first package component, removing the oxide region from the surface of the metal pad of the first package component, and pre-bonding pre-bonding < / RTI >
priorityDate	2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050101324-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007538397-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635

Total number of triples: 35.