http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140108708-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5157cc9d29989d27bd65a85902ddb054 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-036 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-104 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-22 |
| filingDate | 2012-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16435b10607a928abcedf385f07334b7 |
| publicationDate | 2014-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140108708-A |
| titleOfInvention | System and method for extending gas life in a two chamber gas discharge laser system |
| abstract | A method and system for performing injection of a halogen gas into a chamber of a two chamber discharge laser, such as a MOPA excimer laser, to permit operation of the laser within acceptable parameters and to compensate for aging effects without requiring charging is described. A parameter reflecting the efficiency of such a laser is measured and a change in parameter with respect to the operating period of the laser is estimated. The change in parameter for one of the chambers is also measured. At a given time, a total change in the value of the parameter is estimated, from which the amount of change in pressure required to invert the change in value of this parameter is calculated. |
| priorityDate | 2011-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.