http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140108127-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
filingDate | 2014-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_897495346d2d632e4f5c9e29b395c607 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd7a3f69ad120ab203d9c8a923c6c38e |
publicationDate | 2014-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20140108127-A |
titleOfInvention | Photosensitive resin composition for interlayer insulation film |
abstract | Provided is a photosensitive resin composition capable of forming an interlayer insulating film having a low dielectric constant at low temperature baking. 1. A photosensitive resin composition for an interlayer insulating film containing an alkali-soluble resin (A), a photosensitive agent (B) and an organic solvent (C), wherein the alkali-soluble resin (A) comprises a structural unit represented by the following general formula (a- , A structural unit (A2) represented by the following general formula (a-2) and an alicyclic epoxy group-containing unit (A3) in the structure. In the general formula, R 0 and R 1 represent a hydrogen atom or a methyl group, and R a represents an organic group having a hydrogen atom or a hydroxyl group. Rb represents a hydrocarbon group. |
priorityDate | 2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 289.