http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140105399-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2014-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0b9fdcd02896bed15c330df43dce53d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b9845da719074d94bccfec34444a3c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3819fea49b4ed518c3e8d34f44c8a159 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1f8c8f0aeb9ed1a686377d36c064729 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d839018f8ce1e1df25ebb714379d4ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abe0bf00aaca69b71750dd5e9834ce5d |
| publicationDate | 2014-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140105399-A |
| titleOfInvention | Method of forming resist pattern and method of producing structure including phase separation structure |
| abstract | An acid is generated by exposure and a photosensitive resin composition in which the solubility in a developing solution is changed by the action of an acid is used to form a photosensitive resin film on a support and the photosensitive resin film is exposed, A step (1) of forming a pre-pattern by negative-type development using a developer containing an organic solvent, a step (2) of forming a neutralization film containing a surface treatment agent on the support on which the pre-pattern is formed, A step (3) of alkali developing the pre-pattern formed on the support and the neutralization film to remove the pre-pattern from the support and forming a pattern made of this neutralization film on the support, . |
| priorityDate | 2013-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 249.