http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140104509-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de1ded4bc8f558b82c4f17b0db03530d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2013-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1075069b081e4e5b009fab792ba73e3d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a6de2a1bd5e9655de545d4812476164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11a4bedae00ea02ac1439a3f74ef3c83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8589ba57bf313f3f4a4df9003cb6438c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d61d38967f12d393c2a479e58640ad3a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c59f434c2f4d31420963340e6ed407d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b19972989fcc92cdcd414cb82a2e9ea6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_655a1ecba2208935ebfdaac6a789ddad |
| publicationDate | 2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140104509-A |
| titleOfInvention | Organometallic Compound Supply Apparatus Having Filling Plate |
| abstract | The present invention relates to an organometallic compound supply apparatus. The organometallic compound supply apparatus of the present invention includes a filling plate disposed laterally inside the vessel. The filling plate has a plurality of filling holes longitudinally formed to fill the solid organometallic compound. The filling of the organic metal compounds in the plurality of filling holes minimizes the possibility of channeling effects and provides the same effect as connecting dozens of conventional organic metal compound supplying devices in parallel. Furthermore, the organometallic compound supply device of the present invention includes a dispersion filter inserted at the top of the filling plate. The dispersion filter can uniformly disperse the carrier gas to contain the organometallic compound in the carrier gas at a uniform concentration. |
| priorityDate | 2013-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.