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filingDate 2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ccf5635428bb5566624c824eb70e892
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publicationDate 2014-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140102697-A
titleOfInvention Abrasive material regeneration method and regenerated abrasive material
abstract An object of the present invention is to provide an abrasive material recycling method and a reclaimed abrasive which can recover cerium oxide from a used abrasive containing cerium oxide as a main component in an efficient manner and then obtain a reclaimed abrasive product by a simple method. An abrasive material recycling method of the present invention reclaims a cerium oxide abrasive material from a used abrasive slurry containing a cerium oxide abrasive material obtained by polishing an object to be polished containing silicon as a main component and recovers the abrasive material slurry discharged from the polishing machine A slurry recovering step A and a magnesium salt as an inorganic salt are added to the recovered abrasive slurry so that the abrasive is agglomerated under a condition that the pH value of the mother liquor in terms of 25 DEG C is not less than 6.5 and less than 10.0, And an abrasive material recovering step C for recovering the separated and concentrated abrasive material, thereby regenerating the abrasive containing cerium oxide.
priorityDate 2011-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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