http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140102254-A

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filingDate 2012-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66ededae8e15ffccee601a53ac543e35
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publicationDate 2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140102254-A
titleOfInvention Self-aligned gate structure for field effect transistor
abstract The field effect transistor includes a substrate having an epitaxial layer, base regions extending from the top of the epitaxial layer to the epitaxial layer, an isolation region extending between the two base regions of the top of the substrate with sidewalls; And a polysilicon gate structure covering the isolation region comprising the sidewalls, wherein the effective gates are formed by a portion of the polysilicon covering the sidewalls on the base region.
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Total number of triples: 23.