http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140090207-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2baf849d216e689ecc40ccc931a7a7bc |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-61 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2258 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-142 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02 |
filingDate | 2012-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9c695a2660b68addd663f02816c9a70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_322d2443eb42c35d6b3f456ae5f5f3e0 |
publicationDate | 2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20140090207-A |
titleOfInvention | Methods for depth-direction analysis of polymeric thin-film structure and organic film |
abstract | A polymer thin film structure comprising two or more kinds of polymer compounds, at least one of which is labeled with a stable isotope, and a structure including a polymer compound labeled with a stable isotope is sputtered by sputter ions along the depth direction And a step of obtaining a mass spectrum of a secondary ion containing the stable isotope by a time-of-flight secondary ion mass spectrometry is repeated to obtain a depth of a polymer thin film structure which obtains a depth profile of a fragment containing the stable isotope A method of forming a conductive carbon coating layer on the surface of an organic film and sputtering the carbon-coated organic film along a depth direction thereof with sputter ions; A step of obtaining the secondary ion mass spectrum of the substance to be analyzed Clothing, by providing an analysis of the organic layer depth-wise method to obtain a depth profile for the analyte. |
priorityDate | 2011-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.