http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140090207-A

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filingDate 2012-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9c695a2660b68addd663f02816c9a70
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publicationDate 2014-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20140090207-A
titleOfInvention Methods for depth-direction analysis of polymeric thin-film structure and organic film
abstract A polymer thin film structure comprising two or more kinds of polymer compounds, at least one of which is labeled with a stable isotope, and a structure including a polymer compound labeled with a stable isotope is sputtered by sputter ions along the depth direction And a step of obtaining a mass spectrum of a secondary ion containing the stable isotope by a time-of-flight secondary ion mass spectrometry is repeated to obtain a depth of a polymer thin film structure which obtains a depth profile of a fragment containing the stable isotope A method of forming a conductive carbon coating layer on the surface of an organic film and sputtering the carbon-coated organic film along a depth direction thereof with sputter ions; A step of obtaining the secondary ion mass spectrum of the substance to be analyzed Clothing, by providing an analysis of the organic layer depth-wise method to obtain a depth profile for the analyte.
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